Inventor · disambiguated record
Gishun Hsu
Also filed as: HSU GISHUN
4 granted patents·1 pending application·78 citations·filing 2008–2021
77Inventor score
Top patents by PatentIndex Score
5 records- 0192US7820556B2Method for purifying acetylene gas for use in semiconductor processesNOVELLUS SYSTEMS INC·Filed 2008·Granted Oct 26, 2010·32 cites·28 claims
- 0291US7955990B2Method for improved thickness repeatability of PECVD deposited carbon filmsNOVELLUS SYSTEMS INC·Filed 2008·Granted Jun 7, 2011·26 cites·17 claims
- 0388US8309473B2Method for purifying acetylene gas for use in semiconductor processesHSU GISHUN·Filed 2010·Granted Nov 13, 2012·20 cites·12 claims
- 0451US2023034561A1Ammonia abatement for improved roughing pump performanceLAM RES CORP·Filed 2021·Application pending·0 cites
- 0544US12394608B2Cleaning system for removing deposits from pump in an exhaust of a substrate processing systemLAM RES CORP·Filed 2019·Granted Aug 19, 2025·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →