Inventor · disambiguated record
Nagasubramaniyan Chandrasekaran
Also filed as: CHANDRASEKARAN NAGASUBRAMANIYA · CHANDRASEKARAN NAGASUBRAMANIYAN
24 granted patents·2 pending applications·199 citations·filing 2002–2025
96Inventor score
Files withMICRON TECHNOLOGY INC26
Top patents by PatentIndex Score
26 records- 0193US7314401B2Methods and systems for conditioning planarizing pads used in planarizing substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Jan 1, 2008·15 cites·12 claims
- 0293US7258596B2Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2006·Granted Aug 21, 2007·14 cites·17 claims
- 0392US7326105B2Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 5, 2008·18 cites·34 claims
- 0492US6872132B2Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2003·Granted Mar 29, 2005·29 cites·54 claims
- 0585US7347767B2Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2007·Granted Mar 25, 2008·9 cites·19 claims
- 0685US6939211B2Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutionsMICRON TECHNOLOGY INC·Filed 2003·Granted Sep 6, 2005·26 cites·32 claims
- 0783US7011566B2Methods and systems for conditioning planarizing pads used in planarizing substratesMICRON TECHNOLOGY INC·Filed 2002·Granted Mar 14, 2006·16 cites·33 claims
- 0880US7201635B2Methods and systems for conditioning planarizing pads used in planarizing substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Apr 10, 2007·5 cites·25 claims
- 0979US7070478B2Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Jul 4, 2006·12 cites·35 claims
- 1078US7163439B2Methods and systems for conditioning planarizing pads used in planarizing substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Jan 16, 2007·4 cites·18 claims
- 1178US7147543B2Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2005·Granted Dec 12, 2006·5 cites·20 claims
- 1277US7033246B2Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Apr 25, 2006·11 cites·35 claims
- 1370US6884144B2Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layersMICRON TECHNOLOGY INC·Filed 2002·Granted Apr 26, 2005·11 cites·61 claims
- 1469US7235000B2Methods and systems for conditioning planarizing pads used in planarizing substratesMICRON TECHNOLOGY INC·Filed 2006·Granted Jun 26, 2007·2 cites·9 claims
- 1568US7381647B2Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layersMICRON TECHNOLOGY INC·Filed 2005·Granted Jun 3, 2008·2 cites·37 claims
- 1666US7988529B2Methods and tools for controlling the removal of material from microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2009·Granted Aug 2, 2011·2 cites·22 claims
- 1766US2025149362A1Wafer processing systems, wafer transport devices, and related methodsMICRON TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 1862US7008299B2Apparatus and method for mechanical and/or chemical-mechanical planarization of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Mar 7, 2006·7 cites·54 claims
- 1960US2024161264A1Defect characterization in semiconductor devices based on image processingMICRON TECHNOLOGY INC·Filed 2023·Application pending·0 cites
- 2059US12237189B2Wafer storage devices configured to measure physical properties of wafers stored thereinMICRON TECHNOLOGY INC·Filed 2019·Granted Feb 25, 2025·0 cites·2 claims
- 2159US7033248B2Systems and methods for monitoring characteristics of a polishing pad used in polishing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Apr 25, 2006·4 cites·35 claims
- 2255US7004817B2Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2002·Granted Feb 28, 2006·4 cites·61 claims
- 2351US7223297B2Planarizing solutions including abrasive elements, and methods for manufacturing and using such planarizing solutionsMICRON TECHNOLOGY INC·Filed 2005·Granted May 29, 2007·0 cites·7 claims
- 2449US7527545B2Methods and tools for controlling the removal of material from microfeature workpiecesMICRON TECHNOLOGY INC·Filed 2006·Granted May 5, 2009·0 cites·32 claims
- 2549US7115016B2Apparatus and method for mechanical and/or chemical-mechanical planarization of micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2005·Granted Oct 3, 2006·0 cites·24 claims
- 2642US6958001B2Carrier assemblies, planarizing apparatuses including carrier assemblies, and methods for planarizing micro-device workpiecesMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 25, 2005·3 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →