Inventor · disambiguated record
Roel Boumen
Also filed as: BOUMEN ROEL
3 granted patents·25 citations·filing 2004–2006
70Inventor score
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0171US7195407B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer programASML NETHERLANDS BV·Filed 2006·Granted Mar 27, 2007·10 cites·12 claims
- 0264US7068351B2Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jun 27, 2006·8 cites·31 claims
- 0355US7184849B2Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer programASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·7 cites·34 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →