Inventor · disambiguated record
Hisakazu Nakayama
Also filed as: NAKAYAMA HISAKAZU
5 granted patents·60 citations·filing 2000–2016
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0184US6654668B1Processing apparatus, processing system, distinguishing method, and detecting methodTOKYO ELECTRON LTD·Filed 2000·Granted Nov 25, 2003·36 cites·21 claims
- 0282US8670656B2Liquid heating unit, liquid processing apparatus including the same, and liquid processing methodNISHIDA TOSHIHIKO·Filed 2011·Granted Mar 11, 2014·9 cites·14 claims
- 0379US7868270B2Temperature control for performing heat process in coating/developing system for resist filmTOKYO ELECTRON LTD·Filed 2008·Granted Jan 11, 2011·7 cites·18 claims
- 0475US10422551B2Substrate liquid processing apparatus, and control method of heater unitTOKYO ELECTRON LTD·Filed 2016·Granted Sep 24, 2019·3 cites·13 claims
- 0573US7755003B2Temperature control for performing heat process on resist filmTOKYO ELECTRON LTD·Filed 2007·Granted Jul 13, 2010·5 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →