Inventor · disambiguated record
Tae-Sin Park
Also filed as: PARK TAE-SIN
6 granted patents·24 citations·filing 1997–2003
78Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0154US6436609B1Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected theretoSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Aug 20, 2002·5 cites·11 claims
- 0248US6934006B2Exposure apparatus and exposure method for use in forming a pattern of a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Aug 23, 2005·3 cites·5 claims
- 0342US6786970B2Equipment for fabricating a semiconductor productSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Sep 7, 2004·2 cites·17 claims
- 0440US6239859B1Photolithographic apparatus composed of coater/developer and a plurality of steppers in parallel connected theretoSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted May 29, 2001·9 cites·19 claims
- 0536US6774055B2In-line system having overlay accuracy measurement function and method for the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Aug 10, 2004·0 cites·14 claims
- 0626US6042649APolyimide coating device having a polyimide supply status sensing deviceSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Mar 28, 2000·5 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →