Inventor · disambiguated record
Tatsuhei Yoshida
Also filed as: YOSHIDA TATSUHEI
3 granted patents·13 citations·filing 2011–2015
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0188US8985880B2Coating and developing apparatus and methodMATSUOKA NOBUAKI·Filed 2011·Granted Mar 24, 2015·9 cites·18 claims
- 0284US9417529B2Coating and developing apparatus and methodTOKYO ELECTRON LTD·Filed 2015·Granted Aug 16, 2016·4 cites·12 claims
- 0335US9026240B2Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage mediumHAYAKAWA MAKOTO·Filed 2011·Granted May 5, 2015·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →