Inventor · disambiguated record
Richard O. Henry
Also filed as: HENRY RICHARD O
9 granted patents·1 pending application·31 citations·filing 2002–2013
83Inventor score
Files withIBM6CHARTERED SEMICONDUCTOR MFG1FITZSIMMONS JOHN A1HENRY RICHARD O1SAMSUNG ELECTRONICS CO LTD1
Top patents by PatentIndex Score
10 records- 0188US7563670B2Method for etching single-crystal semiconductor selective to amorphous/polycrystalline semiconductor and structure formed by sameIBM·Filed 2006·Granted Jul 21, 2009·14 cites·16 claims
- 0281US7407605B2Manufacturable CoWP metal cap process for copper interconnectsIBM·Filed 2007·Granted Aug 5, 2008·8 cites·3 claims
- 0374US7902082B2Method of forming field effect transistors using diluted hydrofluoric acid to remove sacrificial nitride spacersSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted Mar 8, 2011·5 cites·10 claims
- 0461US7955936B2Semiconductor fabrication process including an SiGe rework methodCHARTERED SEMICONDUCTOR MFG·Filed 2008·Granted Jun 7, 2011·1 cites·19 claims
- 0554US8992691B2Partial solution replacement in recyclable persulfuric acid cleaning systemsHENRY RICHARD O·Filed 2011·Granted Mar 31, 2015·1 cites·8 claims
- 0650US8337627B2Cleaning exhaust screens in a manufacturing processFITZSIMMONS JOHN A·Filed 2009·Granted Dec 25, 2012·0 cites·20 claims
- 0748US9165801B2Partial solution replacement in recyclable persulfuric acid cleaning systemsIBM·Filed 2013·Granted Oct 20, 2015·0 cites·7 claims
- 0845US7253106B2Manufacturable CoWP metal cap process for copper interconnectsIBM·Filed 2004·Granted Aug 7, 2007·1 cites·41 claims
- 0942US8021945B2Bottle-shaped trench capacitor with enhanced capacitanceIBM·Filed 2009·Granted Sep 20, 2011·1 cites·14 claims
- 1038US2004094511A1Method of forming planar Cu interconnects without chemical mechanical polishingIBM·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →