Inventor · disambiguated record
Yoshimasa Oshima
Also filed as: OSHIMA YOSHIMASA
32 granted patents·4 pending applications·659 citations·filing 1977–2014
97Inventor score
Top patents by PatentIndex Score
36 records- 0198US4115762AAlignment pattern detecting apparatusHITACHI LTD·Filed 1977·Granted Sep 19, 1978·90 cites·5 claims
- 0297US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 0396US7710557B2Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 4, 2010·24 cites·7 claims
- 0496US4614427AAutomatic contaminants detection apparatusHITACHI LTD·Filed 1984·Granted Sep 30, 1986·141 cites·11 claims
- 0595US8035808B2Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2010·Granted Oct 11, 2011·14 cites·17 claims
- 0692US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 0792US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 0891US7768635B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·10 cites·20 claims
- 0991US5046847AMethod for detecting foreign matter and device for realizing sameHITACHI LTD·Filed 1988·Granted Sep 10, 1991·100 cites·33 claims
- 1090US8218138B2Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 1190US7869024B2Method and its apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 11, 2011·11 cites·13 claims
- 1289US7675613B2Defect inspection methodHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 9, 2010·9 cites·8 claims
- 1387US8314929B2Method and its apparatus for inspecting defectsURANO YUTA·Filed 2011·Granted Nov 20, 2012·5 cites·6 claims
- 1487US7719673B2Defect inspecting device for sample surface and defect detection method thereforHITACHI HIGH TECH CORP·Filed 2007·Granted May 18, 2010·10 cites·15 claims
- 1587US4508453APattern detection systemHITACHI LTD·Filed 1982·Granted Apr 2, 1985·48 cites·11 claims
- 1687US4423331AMethod and apparatus for inspecting specimen surfaceHITACHI LTD·Filed 1981·Granted Dec 27, 1983·52 cites·6 claims
- 1786US7916288B2Defect inspection methodHITACHI HIGH TECH CORP·Filed 2010·Granted Mar 29, 2011·4 cites·12 claims
- 1881US7973920B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Jul 5, 2011·3 cites·19 claims
- 1980US8654350B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 2079US8482727B2Defect inspection methodNAKAO TOSHIYUKI·Filed 2012·Granted Jul 9, 2013·2 cites·13 claims
- 2179US8115915B2Defect inspection method and apparatusNAKAO TOSHIYUKI·Filed 2011·Granted Feb 14, 2012·2 cites·13 claims
- 2279US7965386B2Method and its apparatus for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Jun 21, 2011·2 cites·7 claims
- 2378US8264679B2Inspection apparatusOSHIMA YOSHIMASA·Filed 2012·Granted Sep 11, 2012·2 cites·18 claims
- 2475US8477302B2Defect inspection apparatusURANO YUTA·Filed 2009·Granted Jul 2, 2013·4 cites·18 claims
- 2575US4362389AMethod and apparatus for projection type mask alignmentHITACHI LTD·Filed 1980·Granted Dec 7, 1982·29 cites·7 claims
- 2672US4242702AApparatus for automatically checking external appearance of objectHITACHI LTD·Filed 1977·Granted Dec 30, 1980·21 cites·23 claims
- 2769US8120766B2Inspection apparatusOSHIMA YOSHIMASA·Filed 2009·Granted Feb 21, 2012·1 cites·17 claims
- 2866US7970199B2Method and apparatus for detecting defect on a surface of a specimenHITACHI HIGH TECH CORP·Filed 2007·Granted Jun 28, 2011·5 cites·18 claims
- 2965US9506872B2Inspection apparatusHITACHI HIGH TECH CORP·Filed 2014·Granted Nov 29, 2016·0 cites·19 claims
- 3064US2014176943A1Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2014·Application pending·0 cites
- 3162US8934092B2Surface defect inspection method and apparatusOSHIMA YOSHIMASA·Filed 2013·Granted Jan 13, 2015·0 cites·14 claims
- 3260US8705026B2Inspection apparatusOSHIMA YOSHIMASA·Filed 2012·Granted Apr 22, 2014·0 cites·26 claims
- 3358US8400629B2Surface defect inspection method and apparatusOSHIMA YOSHIMASA·Filed 2011·Granted Mar 19, 2013·0 cites·15 claims
- 3458US2008144024A1Apparatus And Method For Inspecting DefectsHITACHI HIGH TECH CORP·Filed 2008·Application pending·0 cites
- 3552US2010265496A1Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2010·Application pending·0 cites
- 3650US2010225904A1Defect Inspection Tool For Sample Surface And Defect Detection Method ThereforOSHIMA YOSHIMASA·Filed 2010·Application pending·0 cites
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