Inventor · disambiguated record
Chang-Ro Yoon
Also filed as: YOON CHANG RO
5 granted patents·39 citations·filing 2002–2008
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0180US8113918B2Substrate supporting unit and single type substrate polishing apparatus using the sameKOO GYO-WOOG·Filed 2008·Granted Feb 14, 2012·18 cites·27 claims
- 0266US8398812B2Apparatus and method for treating substratesKIM YI JUNG·Filed 2007·Granted Mar 19, 2013·5 cites·15 claims
- 0360US6784106B2Wafer drying methodDNS KOREA CO LTD·Filed 2002·Granted Aug 31, 2004·9 cites·16 claims
- 0452US6757989B2Wafer drying apparatusDNS KOREA LTD·Filed 2002·Granted Jul 6, 2004·7 cites·20 claims
- 0541US7637272B2Method and apparatus for cleaning and drying substratesSEMES CO LTD·Filed 2006·Granted Dec 29, 2009·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →