Inventor · disambiguated record

Jennming Chen

Also filed as: CHEN JENNMING · CHEN JENNMING JAMES

3 granted patents·351 citations·filing 1995–2004

78Inventor score

Technology areasG01J G01N H10P

Files withKLA TENCOR CORP1 KLA TENCOR TECH CORP1 TENCOR INSTRUMENTS1

Top patents by PatentIndex Score

3 records

0192US5771094AFilm measurement system with improved calibrationKLA TENCOR CORP·Filed 1997·Granted Jun 23, 1998·180 cites·25 claims
0292US5581350AMethod and system for calibrating an ellipsometerTENCOR INSTRUMENTS·Filed 1995·Granted Dec 3, 1996·162 cites·20 claims
0361US7190441B1Methods and systems for preparing a sample for thin film analysisKLA TENCOR TECH CORP·Filed 2004·Granted Mar 13, 2007·9 cites·20 claims

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