Inventor · disambiguated record
Hikaru Yoshitaka
Also filed as: YOSHITAKA HIKARU
4 granted patents·2 pending applications·111 citations·filing 2000–2007
78Inventor score
Top patents by PatentIndex Score
6 records- 0191US7481886B2Plasma process system and plasma process methodTOKYO ELECTRON LTD·Filed 2003·Granted Jan 27, 2009·63 cites·12 claims
- 0284US6764939B1Semiconductor device and method of manufacturing the sameTOKYO ELECTRON LTD·Filed 2000·Granted Jul 20, 2004·39 cites·17 claims
- 0367US8394231B2Plasma process device and plasma process methodTAKATSUKI KOICHI·Filed 2007·Granted Mar 12, 2013·3 cites·18 claims
- 0463US6620739B1Method of manufacturing semiconductor deviceTOKYO ELECTRON LTD·Filed 2000·Granted Sep 16, 2003·6 cites·9 claims
- 0552US2007158027A1Plasma treatment deviceTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 0639US2004219736A1Semiconductor device and method of manufacturing the sameTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →