Inventor · disambiguated record
Jurgen Benischek
Also filed as: BENISCHEK JURGEN
3 granted patents·11 citations·filing 2005–2011
64Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0187US7428038B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidASML NETHERLANDS BV·Filed 2005·Granted Sep 23, 2008·8 cites·20 claims
- 0274US8107053B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidVERHAGEN MARTINUS CORNELIS MARIA·Filed 2008·Granted Jan 31, 2012·3 cites·20 claims
- 0353US8958051B2Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquidVERHAGEN MARTINUS CORNELIS MARIA·Filed 2011·Granted Feb 17, 2015·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →