Inventor · disambiguated record
Tsuyoshi Soma
Also filed as: SOMA Tsuyoshi
2 granted patents·1 pending application·0 citations·filing 2017–2025
25Inventor score
Files withEBARA CORP3
Top patents by PatentIndex Score
3 records- 0174US2025367711A1Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0262US12403507B2Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·10 claims
- 0347US10508355B2Plating apparatusEBARA CORP·Filed 2017·Granted Dec 17, 2019·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →