Inventor · disambiguated record
Ayumu Saito
Also filed as: SAITO AYUMU
4 granted patents·2 pending applications·37 citations·filing 2001–2025
71Inventor score
Top patents by PatentIndex Score
6 records- 0175US6616010B2Medicine feeder apparatusYUYAMA MFG CO LTD·Filed 2002·Granted Sep 9, 2003·25 cites·9 claims
- 0274US2025367711A1Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 0362US12403507B2Transfer apparatus, cleaning module, and substrate processing apparatusEBARA CORP·Filed 2021·Granted Sep 2, 2025·0 cites·10 claims
- 0462US6981609B2Injection drug feeding deviceYUYAMA MFG CO LTD·Filed 2001·Granted Jan 3, 2006·12 cites·29 claims
- 0554US11911868B2Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing methodEBARA CORP·Filed 2021·Granted Feb 27, 2024·0 cites·15 claims
- 0652US2025312882A1Substrate polishing method, program, and substrate polishing apparatusEBARA CORP·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →