Inventor · disambiguated record
Daniel J. Woodruff
Also filed as: WOODRUFF DANIEL · WOODRUFF DANIEL J
85 granted patents·21 pending applications·3,638 citations·filing 1989–2021
99Inventor score
Top patents by PatentIndex Score
106 records- 0199US6976822B2End-effectors and transfer devices for handling microelectronic workpiecesSEMITOOL INC·Filed 2003·Granted Dec 20, 2005·526 cites·44 claims
- 0299US6080291AApparatus for electrochemically processing a workpiece including an electrical contact assembly having a seal memberSEMITOOL INC·Filed 1998·Granted Jun 27, 2000·388 cites·8 claims
- 0397US10203604B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2016·Granted Feb 12, 2019·16 cites·16 claims
- 0497US6497801B1Electroplating apparatus with segmented anode arraySEMITOOL INC·Filed 1998·Granted Dec 24, 2002·120 cites·14 claims
- 0597US6228232B1Reactor vessel having improved cup anode and conductor assemblySEMITOOL INC·Filed 1998·Granted May 8, 2001·110 cites·22 claims
- 0695US7931786B2Apparatus and method for agitating liquids in wet chemical processing of microfeature workpiecesSEMITOOL INC·Filed 2006·Granted Apr 26, 2011·18 cites·25 claims
- 0795US6440178B2Modular semiconductor workpiece processing toolSEMITOOL INC·Filed 2001·Granted Aug 27, 2002·82 cites·12 claims
- 0895US6203582B1Modular semiconductor workpiece processing toolSEMITOOL INC·Filed 1996·Granted Mar 20, 2001·154 cites·14 claims
- 0994US6342137B1Lift and rotate assembly for use in a workpiece processing station and a method of attaching the sameSEMITOOL INC·Filed 2000·Granted Jan 29, 2002·66 cites·9 claims
- 1094US6309520B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·92 cites·61 claims
- 1194US5498116AEntry-exit port for cartridge libraryEXABYTE CORP·Filed 1993·Granted Mar 12, 1996·81 cites·41 claims
- 1293US7842173B2Apparatus and methods for electrochemical processing of microfeature wafersSEMITOOL INC·Filed 2007·Granted Nov 30, 2010·9 cites·24 claims
- 1393US6309524B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 30, 2001·107 cites·39 claims
- 1493US6091498ASemiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 1997·Granted Jul 18, 2000·115 cites·12 claims
- 1592US9309603B2Component cleaning in a metal plating apparatusWOODRUFF DANIEL J·Filed 2011·Granted Apr 12, 2016·6 cites·16 claims
- 1692US6672820B1Semiconductor processing apparatus having linear conveyer systemSEMITOOL INC·Filed 1997·Granted Jan 6, 2004·145 cites·13 claims
- 1792US6168695B1Lift and rotate assembly for use in a workpiece processing station and a method of attaching the sameFiled 1999·Granted Jan 2, 2001·97 cites·19 claims
- 1892US5487579APicker mechanism for data cartridgesEXABYTE CORP·Filed 1993·Granted Jan 30, 1996·63 cites·7 claims
- 1991US10474033B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2017·Granted Nov 12, 2019·4 cites·18 claims
- 2091US7002698B2Semiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 2003·Granted Feb 21, 2006·44 cites·11 claims
- 2191US6428660B2Reactor vessel having improved cup, anode and conductor assemblySEMITOOL INC·Filed 2001·Granted Aug 6, 2002·18 cites·18 claims
- 2291US5731678AProcessing head for semiconductor processing machinesSEMITOOL INC·Filed 1996·Granted Mar 24, 1998·120 cites·32 claims
- 2390US6645355B2Semiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 2001·Granted Nov 11, 2003·54 cites·17 claims
- 2490US6428662B1Reactor vessel having improved cup, anode and conductor assemblySEMITOOL INC·Filed 1999·Granted Aug 6, 2002·39 cites·27 claims
- 2590US6322677B1Lift and rotate assembly for use in a workpiece processing station and a method of attaching the sameSEMITOOL INC·Filed 2000·Granted Nov 27, 2001·40 cites·7 claims
- 2690US6280582B1Reactor vessel having improved cup, anode and conductor assemblySEMITOOL INC·Filed 1999·Granted Aug 28, 2001·39 cites·21 claims
- 2789US11112697B2Method and apparatus for post exposure processing of photoresist wafersAPPLIED MATERIALS INC·Filed 2019·Granted Sep 7, 2021·3 cites·10 claims
- 2889US9068272B2Electroplating processor with thin membrane supportAPPLIED MATERIALS INC·Filed 2013·Granted Jun 30, 2015·3 cites·11 claims
- 2989US6699373B2Apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 2, 2004·40 cites·42 claims
- 3089US6280583B1Reactor assembly and method of assemblySEMITOOL INC·Filed 1999·Granted Aug 28, 2001·36 cites·31 claims
- 3189US5718339ACartridge rack and library for engaging sameEXABYTE CORP·Filed 1995·Granted Feb 17, 1998·43 cites·15 claims
- 3289US5607275ACartridge library and method of operationEXABYTE CORP·Filed 1994·Granted Mar 4, 1997·60 cites·13 claims
- 3388US8968533B2Electroplating processor with geometric electrolyte flow pathHARRIS RANDY A·Filed 2012·Granted Mar 3, 2015·4 cites·15 claims
- 3488US8313631B2Apparatus and methods for electrochemical processing of microfeature wafersMCHUGH PAUL R·Filed 2010·Granted Nov 20, 2012·3 cites·11 claims
- 3588US6773559B2Processing apparatus including a reactor for electrochemically etching a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Aug 10, 2004·32 cites·12 claims
- 3688US6752584B2Transfer devices for handling microelectronic workpieces within an environment of a processing machine and methods of manufacturing and using such devices in the processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jun 22, 2004·39 cites·16 claims
- 3788US6409892B1Reactor vessel having improved cup, anode, and conductor assemblySEMITOOL INC·Filed 1999·Granted Jun 25, 2002·36 cites·11 claims
- 3887US8500968B2Deplating contacts in an electrochemical plating apparatusWOODRUFF DANIEL J·Filed 2010·Granted Aug 6, 2013·7 cites·15 claims
- 3987US7147760B2Electroplating apparatus with segmented anode arraySEMITOOL INC·Filed 2004·Granted Dec 12, 2006·12 cites·11 claims
- 4087US6869510B2Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 2001·Granted Mar 22, 2005·26 cites·21 claims
- 4187US6623609B2Lift and rotate assembly for use in a workpiece processing station and a method of attaching the sameSEMITOOL INC·Filed 2001·Granted Sep 23, 2003·39 cites·42 claims
- 4287US6303010B1Methods and apparatus for processing the surface of a microelectronic workpieceSEMITOOL INC·Filed 1999·Granted Oct 16, 2001·81 cites·8 claims
- 4386US6921467B2Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Jul 26, 2005·37 cites·44 claims
- 4486US6916412B2Adaptable electrochemical processing chamberSEMITOOL INC·Filed 2001·Granted Jul 12, 2005·35 cites·20 claims
- 4586US6773560B2Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpiecesSEMITOOL INC·Filed 2001·Granted Aug 10, 2004·39 cites·70 claims
- 4686US6654122B1Semiconductor processing apparatus having lift and tilt mechanismSEMITOOL INC·Filed 2000·Granted Nov 25, 2003·31 cites·31 claims
- 4786US5894941ACartridge rack and library for engaging sameEXABYTE CORP·Filed 1997·Granted Apr 20, 1999·36 cites·31 claims
- 4886US5867344ACartridge spine and library employing sameEXABYTE CORP·Filed 1997·Granted Feb 2, 1999·42 cites·22 claims
- 4985US6991710B2Apparatus for manually and automatically processing microelectronic workpiecesSEMITOOL INC·Filed 2002·Granted Jan 31, 2006·34 cites·15 claims
- 5085US5153862ACassette for storing, moving and loading optical storage disk cartridgesPHILIPS CORP·Filed 1989·Granted Oct 6, 1992·32 cites·7 claims
Showing the top 50 of 106 patent records by PatentIndex Score.
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