Inventor · disambiguated record
Roman Chalykh
Also filed as: CHALYKH ROMAN
4 granted patents·5 citations·filing 2016–2020
65Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0180US10719008B2Phase-shift mask for extreme ultraviolet lithographySAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jul 21, 2020·2 cites·20 claims
- 0271US10274820B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Apr 30, 2019·1 cites·15 claims
- 0371US9952502B2Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the sameJEON HWANCHUL·Filed 2016·Granted Apr 24, 2018·2 cites·20 claims
- 0466US11372323B2Phase-shift mask for extreme ultraviolet lithographySAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jun 28, 2022·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →