Inventor · disambiguated record
Greg Sexton
Also filed as: SEXTON GREG · SEXTON GREG S
10 granted patents·233 citations·filing 1999–2013
89Inventor score
Top patents by PatentIndex Score
10 records- 0194US6669783B2High temperature electrostatic chuckLAM RES CORP·Filed 2001·Granted Dec 30, 2003·92 cites·29 claims
- 0292US6646857B2Semiconductor wafer lifting device and methods for implementing the sameLAM RES CORP·Filed 2001·Granted Nov 11, 2003·68 cites·20 claims
- 0377US8137501B2Bevel clean deviceKIM YUNSANG·Filed 2007·Granted Mar 20, 2012·6 cites·16 claims
- 0476US6567258B2High temperature electrostatic chuckLAM RES CORP·Filed 2002·Granted May 20, 2003·17 cites·12 claims
- 0575US6377437B1High temperature electrostatic chuckLAM RES CORP·Filed 1999·Granted Apr 23, 2002·41 cites·27 claims
- 0674US8475624B2Method and system for distributing gas for a bevel edge etcherSEXTON GREG·Filed 2007·Granted Jul 2, 2013·5 cites·10 claims
- 0766US8826857B2Plasma processing assemblies including hinge assembliesSEXTON GREG·Filed 2011·Granted Sep 9, 2014·2 cites·16 claims
- 0864US8328980B2Apparatus and methods for enhanced fluid delivery on bevel etch applicationsSALDANA MIGUEL A·Filed 2009·Granted Dec 11, 2012·2 cites·11 claims
- 0952US8940098B2Method for distributing gas for a bevel etcherLAM RES CORP·Filed 2013·Granted Jan 27, 2015·0 cites·6 claims
- 1048US8671965B2Methods for enhanced fluid delivery on bevel etch applicationsSALDANA MIGUEL A·Filed 2012·Granted Mar 18, 2014·0 cites·19 claims
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