Assignee
KIM YUNSANG
US·3 granted patents·3 pending applications·13 citations·filing 2004–2011
Top patents by PatentIndex Score
6 records- 0179US8308896B2Methods to remove films on bevel edge and backside of wafer and apparatus thereofKIM YUNSANG·Filed 2011·Granted Nov 13, 2012·4 cites·15 claims
- 0277US8137501B2Bevel clean deviceKIM YUNSANG·Filed 2007·Granted Mar 20, 2012·6 cites·16 claims
- 0376US8500951B2Low-K damage avoidance during bevel etch processingKIM YUNSANG·Filed 2010·Granted Aug 6, 2013·3 cites·9 claims
- 0441US2007068623A1Apparatus for the removal of a set of byproducts from a substrate edge and methods thereforKIM YUNSANG·Filed 2005·Application pending·0 cites
- 0540US2008156772A1Method and apparatus for wafer edge processingKIM YUNSANG·Filed 2006·Application pending·0 cites
- 0639US2006054279A1Apparatus for the optimization of atmospheric plasma in a processing systemKIM YUNSANG·Filed 2004·Application pending·0 cites
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