Inventor · disambiguated record
Rikhit Arora
Also filed as: ARORA RIKHIT
7 granted patents·1 pending application·970 citations·filing 1992–2007
91Inventor score
Top patents by PatentIndex Score
8 records- 0197US5628829AMethod and apparatus for low temperature deposition of CVD and PECVD filmsSONY CORP·Filed 1994·Granted May 13, 1997·270 cites·20 claims
- 0294US5273588ASemiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing meansMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 28, 1993·228 cites·9 claims
- 0393US5370739ARotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVDMATERIALS RESEARCH CORP·Filed 1992·Granted Dec 6, 1994·188 cites·67 claims
- 0491US5356476ASemiconductor wafer processing method and apparatus with heat and gas flow controlMATERIALS RESEARCH CORP·Filed 1992·Granted Oct 18, 1994·151 cites·38 claims
- 0581US5567483AProcess for plasma enhanced anneal of titanium nitrideSONY CORP·Filed 1995·Granted Oct 22, 1996·62 cites·9 claims
- 0675US5610106APlasma enhanced chemical vapor deposition of titanium nitride using ammoniaSONY CORP·Filed 1995·Granted Mar 11, 1997·48 cites·8 claims
- 0765US6140215AMethod and apparatus for low temperature deposition of CVD and PECVD filmsTOKYO ELECTRON LTD·Filed 1996·Granted Oct 31, 2000·23 cites·8 claims
- 0848US2008166596A1Re-based alloys usable as deposition targets for forming interlayers in granular perpendicular magnetic recording media & media utilizing said alloysHERAEUS INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →