Inventor · disambiguated record
Sunwoo Yook
Also filed as: YOOK SUNWOO
3 granted patents·0 citations·filing 2021–2023
39Inventor score
Files withSAMSUNG ELECTRONICS CO LTD3
Top patents by PatentIndex Score
3 records- 0163US12431340B2Exhaust gas processing apparatus having plasma source and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
- 0253US11549178B2Apparatus for treating semiconductor process gas and method of treating semiconductor process gasSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jan 10, 2023·0 cites·20 claims
- 0340US11738299B2Exhaust gas processing system including adsorbent for suppressing powder-like byproductSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Aug 29, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →