Inventor · disambiguated record
Young-Suk Sim
Also filed as: SIM YOUNG SUK
7 granted patents·1 pending application·178 citations·filing 2003–2014
85Inventor score
Top patents by PatentIndex Score
8 records- 0193US7914693B2Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the sameKOREA MACH & MATERIALS INST·Filed 2006·Granted Mar 29, 2011·65 cites·10 claims
- 0291US6943117B2UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurizationKOREA MACH & MATERIALS INST·Filed 2003·Granted Sep 13, 2005·88 cites·31 claims
- 0386US9666454B2Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted May 30, 2017·7 cites·17 claims
- 0478US7442316B2Microcontact printing method using imprinted nanostructure and nanostructure thereofKOREA MACH & MATERIALS INST·Filed 2005·Granted Oct 28, 2008·14 cites·19 claims
- 0567US7645133B2UV nanoimprint lithography process and apparatusKOREA MACH & MATERIALS INST·Filed 2005·Granted Jan 12, 2010·2 cites·9 claims
- 0666US8025830B2UV nanoimprint lithography process and apparatusKOREA MACH & MATERIALS INST·Filed 2009·Granted Sep 27, 2011·1 cites·4 claims
- 0759US8168107B2Method of forming a pattern using nano imprinting and method of manufacturing a mold to form such a patternCHO YOUNG TAE·Filed 2009·Granted May 1, 2012·1 cites·20 claims
- 0845US2008299467A1Mask mold, manufacturing method thereof, and method for forming large-sized micro pattern using mask moldSAMSUNG ELECTRONICS CO LTD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →