Inventor · disambiguated record
Shigenobu Maruyama
Also filed as: MARUYAMA SHIGENOBU
21 granted patents·6 pending applications·496 citations·filing 1991–2019
95Inventor score
Files withHITACHI LTD7HITACHI VIA MECHANICS LTD4HAMAMATSU AKIRA3HITACHI HIGH TECH CORP3NAKAO TOSHIYUKI3
Top patents by PatentIndex Score
27 records- 0192US8310665B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Nov 13, 2012·9 cites·18 claims
- 0292US8144337B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2009·Granted Mar 27, 2012·15 cites·15 claims
- 0392US5883437AMethod and apparatus for inspection and correction of wiring of electronic circuit and for manufacture thereofHITACHI LTD·Filed 1995·Granted Mar 16, 1999·175 cites·13 claims
- 0490US5208437AMethod of cutting interconnection pattern with laser and apparatus thereofHITACHI LTD·Filed 1991·Granted May 4, 1993·139 cites·21 claims
- 0586US8599369B2Defect inspection device and inspection methodURANO YUTA·Filed 2010·Granted Dec 3, 2013·6 cites·15 claims
- 0681US8804110B2Fault inspection device and fault inspection methodURANO YUTA·Filed 2011·Granted Aug 12, 2014·4 cites·8 claims
- 0781US8638429B2Defect inspecting method and defect inspecting apparatusNAKAO TOSHIYUKI·Filed 2009·Granted Jan 28, 2014·5 cites·16 claims
- 0880US8654350B2Inspecting method and inspecting apparatus for substrate surfaceHAMAMATSU AKIRA·Filed 2012·Granted Feb 18, 2014·2 cites·10 claims
- 0979US8514388B2Flaw inspecting method and device thereforMARUYAMA SHIGENOBU·Filed 2010·Granted Aug 20, 2013·5 cites·3 claims
- 1079US7498589B2Scanning probe microscopeHITACHI KENKI FINE TECH CO LTD·Filed 2005·Granted Mar 3, 2009·8 cites·10 claims
- 1178US10254235B2Defect inspecting method and defect inspecting apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Apr 9, 2019·1 cites·5 claims
- 1278US5832595AMethod of modifying conductive lines of an electronic circuit board and its apparatusHITACHI LTD·Filed 1994·Granted Nov 10, 1998·58 cites·7 claims
- 1372US7215886B2Optical communication moduleHITACHI LTD·Filed 2002·Granted May 8, 2007·23 cites·12 claims
- 1468US6693699B2Image display device and its repairing method and apparatusHITACHI LTD·Filed 2002·Granted Feb 17, 2004·10 cites·6 claims
- 1566US5229569ALaser machining apparatus and method of the sameHITACHI LTD·Filed 1991·Granted Jul 20, 1993·24 cites·26 claims
- 1659US9228960B2Defect inspecting method and defect inspecting apparatusHITACHI HIGH TECH CORP·Filed 2014·Granted Jan 5, 2016·0 cites·16 claims
- 1758US9841384B2Defect inspecting method and defect inspecting apparatusHITACHI HIGH TECH CORP·Filed 2016·Granted Dec 12, 2017·0 cites·19 claims
- 1854US11781861B2Surface measurement method, component manufacturing method, component inspection method, and component measurement deviceHITACHI ASTEMO LTD·Filed 2019·Granted Oct 10, 2023·0 cites·15 claims
- 1947US2008223839A1Laser Machining ApparatusHITACHI VIA MECHANICS LTD·Filed 2008·Application pending·0 cites
- 2047US2008237204A1Laser Beam Machining Method for Printed Circuit BoardHITACHI VIA MECHANICS LTD·Filed 2008·Application pending·0 cites
- 2145US9041921B2Defect inspection device and defect inspection methodNAKAO TOSHIYUKI·Filed 2011·Granted May 26, 2015·0 cites·6 claims
- 2245US6552771B1Image display device and its repairing method and apparatusHITACHI LTD·Filed 1999·Granted Apr 22, 2003·12 cites·10 claims
- 2339US2006215139A1Pattern exposure method and apparatusHITACHI VIA MECHANICS LTD·Filed 2006·Application pending·0 cites
- 2437US2012092656A1Defect Inspection Method and Defect Inspection ApparatusNAKAO TOSHIYUKI·Filed 2010·Application pending·0 cites
- 2536US2011228537A1Adjustable Beam Size Illumination Optical Apparatus and Beam Size Adjusting MethodHITACHI VIA MECHANICS LTD·Filed 2011·Application pending·0 cites
- 2635US8089614B2Device for changing pitch between light beam axes, and substrate exposure apparatusOSHIDA YOSHITADA·Filed 2007·Granted Jan 3, 2012·0 cites·13 claims
- 2729US2005219493A1Illuminating method, exposing method, and device for thereforOSHIDA YOSHITADA·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →