Inventor · disambiguated record
Adauto Diaz
Also filed as: DIAZ ADAUTO · DIAZ JR ADAUTO
5 granted patents·22 citations·filing 2011–2019
74Inventor score
Top patents by PatentIndex Score
5 records- 0190US8845816B2Method extending the service interval of a gas distribution plateDIAZ ADAUTO·Filed 2012·Granted Sep 30, 2014·8 cites·11 claims
- 0284US8992689B2Method for removing halogen-containing residues from substrateDIAZ ADAUTO·Filed 2012·Granted Mar 31, 2015·8 cites·6 claims
- 0379US8097088B1Methods for processing substrates in a dual chamber processing system having shared resourcesLIM EU JIN·Filed 2011·Granted Jan 17, 2012·6 cites·20 claims
- 0461US11088000B2Wafer based corrosion and time dependent chemical effectsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 10, 2021·0 cites·13 claims
- 0554US10515862B2Wafer based corrosion and time dependent chemical effectsAPPLIED MATERIALS INC·Filed 2017·Granted Dec 24, 2019·0 cites·6 claims
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