Inventor · disambiguated record
Odette Turmel
Also filed as: TURMEL ODETTE
4 granted patents·1 pending application·12 citations·filing 2003–2011
69Inventor score
Top patents by PatentIndex Score
5 records- 0175US7981699B2Method for tunably repairing low-k dielectric damageLAM RES CORP·Filed 2009·Granted Jul 19, 2011·6 cites·12 claims
- 0263US8222155B2Selectivity control in a plasma processing systemTAKESHITA KENJI·Filed 2008·Granted Jul 17, 2012·2 cites·20 claims
- 0349US7534363B2Method for providing uniform removal of organic materialLAM RES CORP·Filed 2004·Granted May 19, 2009·3 cites·13 claims
- 0446US7521362B2Methods for the optimization of ion energy control in a plasma processing systemLAM RES CORP·Filed 2003·Granted Apr 21, 2009·1 cites·38 claims
- 0544US2011244600A1Method for tunably repairing low-k dielectric damageLAM RES CORP·Filed 2011·Application pending·0 cites
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