Inventor · disambiguated record

Josephus Cornelis Johannes Antonlus Vugts

Also filed as: VUGTS JOSEPHUS CORNELIS JOHANNES ANTONIUS

1 granted patent·0 citations·filing 2007–2007

13Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0147US7843548B2Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit systemASML NETHERLANDS BV·Filed 2007·Granted Nov 30, 2010·0 cites·19 claims

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