Inventor · disambiguated record

Mike Paulus Johannes Van Gils

Also filed as: VAN GILS MIKE PAULUS JOHANNES

1 granted patent·0 citations·filing 2018–2018

6Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0141US11143969B2Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted Oct 12, 2021·0 cites·20 claims

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