Inventor · disambiguated record
Thomas R. Stevenson
Also filed as: STEVENSON THOMAS · STEVENSON THOMAS R
4 granted patents·6 pending applications·42 citations·filing 2005–2019
71Inventor score
Top patents by PatentIndex Score
10 records- 0190US7862682B2Showerhead electrode assemblies for plasma processing apparatusesLAM RES CORP·Filed 2007·Granted Jan 4, 2011·32 cites·16 claims
- 0285US9383254B1Symmetric absorber-coupled far-infrared microwave kinetic inductance detectorUS ADM NAT AERONOTICS AND SPACE ADMINISTRATION·Filed 2014·Granted Jul 5, 2016·10 cites·16 claims
- 0352US2022002863A1Plasma processing chamberLAM RES CORP·Filed 2019·Application pending·0 cites
- 0444US2007074969A1Very long cylindrical sputtering target and method for manufacturingSIMPSON WAYNE R·Filed 2006·Application pending·0 cites
- 0543US8313665B2Showerhead electrode assemblies for plasma processing apparatusesSTEVENSON THOMAS R·Filed 2010·Granted Nov 20, 2012·0 cites·11 claims
- 0642US2006272941A1Large area elastomer bonded sputtering target and method for manufacturingSIMPSON WAYNE R·Filed 2005·Application pending·0 cites
- 0737US2018065274A1Method and apparatus for forming ceramic parts in hot isostatic press using ultrasonicsLAM RES CORP·Filed 2016·Application pending·0 cites
- 0836US10074764B2Method of fabricating x-ray absorbers for low-energy x-ray spectroscopyNASA·Filed 2016·Granted Sep 11, 2018·0 cites·22 claims
- 0931US2016379806A1Use of plasma-resistant atomic layer deposition coatings to extend the lifetime of polymer components in etch chambersLAM RES CORP·Filed 2015·Application pending·0 cites
- 1029US2017218521A1Fabrication of petal-shaped masks for suppression of the on-axis poisson spot in telescope systemsSHIRI RON·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →