Inventor · disambiguated record
Peter Clement Paul Vanoppen
Also filed as: VANOPPEN PETER CLEMENT PAUL
7 granted patents·45 citations·filing 2006–2013
81Inventor score
Files withASML NETHERLANDS BV3MEGENS HENRICUS JOHANNES LAMBERTUS2BHATTACHARYYA KAUSTUVE1LEEWIS CHRISTIAN MARINUS1
Top patents by PatentIndex Score
7 records- 0191US9223227B2Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing methodBHATTACHARYYA KAUSTUVE·Filed 2012·Granted Dec 29, 2015·16 cites·21 claims
- 0290US9158194B2Metrology method and apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Oct 13, 2015·9 cites·16 claims
- 0388US7443486B2Method for predicting a critical dimension of a feature imaged by a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Oct 28, 2008·13 cites·35 claims
- 0486US9964853B2Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted May 8, 2018·6 cites·27 claims
- 0554US8502955B2Method of determining a characteristicMEGENS HENRICUS JOHANNES LAMBERTUS·Filed 2009·Granted Aug 6, 2013·1 cites·12 claims
- 0651US8848195B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrateLEEWIS CHRISTIAN MARINUS·Filed 2009·Granted Sep 30, 2014·0 cites·24 claims
- 0743US8982328B2Method and apparatus for overlay measurementMEGENS HENRICUS JOHANNES LAMBERTUS·Filed 2010·Granted Mar 17, 2015·0 cites·18 claims
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