Assignee
BHATTACHARYYA KAUSTUVE
NL·2 granted patents·16 citations·filing 2009–2012
Top patents by PatentIndex Score
2 records- 0191US9223227B2Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing methodBHATTACHARYYA KAUSTUVE·Filed 2012·Granted Dec 29, 2015·16 cites·21 claims
- 0250US9494872B2Inspection method for lithographyBHATTACHARYYA KAUSTUVE·Filed 2009·Granted Nov 15, 2016·0 cites·32 claims
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