Inventor · disambiguated record
Toshiyuki Shigaraki
Also filed as: SHIGARAKI TOSHIYUKI
2 granted patents·1 pending application·21 citations·filing 2001–2005
59Inventor score
Files withCANON KK2
Top patents by PatentIndex Score
3 records- 0183US7262830B2Exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted Aug 28, 2007·14 cites·5 claims
- 0255US6909372B2Power monitoring unit, control method therefor, and exposure apparatusCANON KK·Filed 2003·Granted Jun 21, 2005·7 cites·17 claims
- 0325US2002006675A1Semiconductor manufacturing apparatus and method of manufacturing semiconductor devicesFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →