Inventor · disambiguated record
Songnian Rong
Also filed as: RONG SONGNIAN
7 granted patents·1 pending application·26 citations·filing 2011–2022
77Inventor score
Top patents by PatentIndex Score
8 records- 0195US10181185B2Image based specimen process controlKLA TENCOR CORP·Filed 2017·Granted Jan 15, 2019·21 cites·35 claims
- 0270US9576861B2Method and system for universal target based inspection and metrologyKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·2 cites·25 claims
- 0370US2022230293A1Method and system for mixed mode wafer inspectionKLA CORP·Filed 2022·Application pending·0 cites
- 0461US8989479B2Region based virtual fourier filterGAO LISHENG·Filed 2011·Granted Mar 24, 2015·3 cites·35 claims
- 0559US11295438B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Apr 5, 2022·0 cites·9 claims
- 0653US10192303B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jan 29, 2019·0 cites·34 claims
- 0738US9360863B2Data perturbation for wafer inspection or metrology setup using a model of a differenceTHATTAISUNDARAM GOVIND·Filed 2011·Granted Jun 7, 2016·0 cites·39 claims
- 0836US9053390B2Automated inspection scenario generationMAHADEVAN MOHAN·Filed 2012·Granted Jun 9, 2015·0 cites·17 claims
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