Inventor · disambiguated record
Vijay Surla
Also filed as: SURLA VIJAY
6 granted patents·26 citations·filing 2014–2020
79Inventor score
Technology areasH10P
Files withAIR LIQUIDE AMERICAN6
Top patents by PatentIndex Score
6 records- 0194US9659788B2Nitrogen-containing compounds for etching semiconductor structuresAIR LIQUIDE AMERICAN·Filed 2015·Granted May 23, 2017·13 cites·20 claims
- 0293US11430663B2Iodine-containing compounds for etching semiconductor structuresAIR LIQUIDE AMERICAN·Filed 2020·Granted Aug 30, 2022·3 cites·18 claims
- 0386US10607850B2Iodine-containing compounds for etching semiconductor structuresAIR LIQUIDE AMERICAN·Filed 2016·Granted Mar 31, 2020·4 cites·19 claims
- 0479US10256109B2Nitrogen-containing compounds for etching semiconductor structuresAIR LIQUIDE AMERICAN·Filed 2017·Granted Apr 9, 2019·2 cites·19 claims
- 0577US9773679B2Method of etching semiconductor structures with etch gasAIR LIQUIDE AMERICAN·Filed 2014·Granted Sep 26, 2017·3 cites·15 claims
- 0672US10115600B2Method of etching semiconductor structures with etch gasAIR LIQUIDE AMERICAN·Filed 2017·Granted Oct 30, 2018·1 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →