Inventor · disambiguated record
Baiei Kawano
Also filed as: KAWANO BAIEI
5 granted patents·1 pending application·734 citations·filing 2003–2004
86Inventor score
Files withASM JAPAN6
Top patents by PatentIndex Score
6 records- 0197US7408225B2Apparatus and method for forming thin film using upstream and downstream exhaust mechanismsASM JAPAN·Filed 2004·Granted Aug 5, 2008·406 cites·29 claims
- 0297US6921556B2Method of film deposition using single-wafer-processing type CVDASM JAPAN·Filed 2003·Granted Jul 26, 2005·256 cites·11 claims
- 0386US7276123B2Semiconductor-processing apparatus provided with susceptor and placing blockASM JAPAN·Filed 2004·Granted Oct 2, 2007·30 cites·33 claims
- 0478US7381291B2Dual-chamber plasma processing apparatusASM JAPAN·Filed 2004·Granted Jun 3, 2008·24 cites·19 claims
- 0577US7267725B2Thin-film deposition apparatusASM JAPAN·Filed 2004·Granted Sep 11, 2007·18 cites·42 claims
- 0650US2005098111A1Apparatus for single-wafer-processing type CVDASM JAPAN·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →