Inventor · disambiguated record
Robert K. Becker
Also filed as: BECKER ROBERT K
10 granted patents·3 pending applications·188 citations·filing 2001–2015
88Inventor score
Top patents by PatentIndex Score
13 records- 0191US7060988B2Method and apparatus for improved beam stability in high current gas-cluster ion beam processing systemEPION CORP·Filed 2005·Granted Jun 13, 2006·17 cites·23 claims
- 0290US8097860B2Multiple nozzle gas cluster ion beam processing system and method of operatingTABAT MARTIN D·Filed 2010·Granted Jan 17, 2012·13 cites·20 claims
- 0386US6676989B2Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technologyEPION CORP·Filed 2001·Granted Jan 13, 2004·145 cites·33 claims
- 0475US8304033B2Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzlesTABAT MARTIN D·Filed 2009·Granted Nov 6, 2012·3 cites·45 claims
- 0572US9305746B2Pre-aligned nozzle/skimmerTEL EPION INC·Filed 2014·Granted Apr 5, 2016·2 cites·9 claims
- 0671US9029808B2Low contamination scanner for GCIB systemTEL EPION INC·Filed 2014·Granted May 12, 2015·3 cites·18 claims
- 0771US8981322B2Multiple nozzle gas cluster ion beam systemTABAT MARTIN D·Filed 2009·Granted Mar 17, 2015·2 cites·58 claims
- 0863US9540725B2Method and apparatus for beam deflection in a gas cluster ion beam systemTEL EPION INC·Filed 2015·Granted Jan 10, 2017·1 cites·20 claims
- 0963US8338806B2Gas cluster ion beam system with rapid gas switching apparatusGRAF MICHAEL·Filed 2010·Granted Dec 25, 2012·2 cites·29 claims
- 1049US2010243913A1Pre-aligned nozzle/skimmerTEL EPION INC·Filed 2009·Application pending·0 cites
- 1139US9343259B2GCIB nozzle assemblyTEL EPION INC·Filed 2015·Granted May 17, 2016·0 cites·20 claims
- 1239US2013082189A1Pre-aligned multi-beam nozzle/skimmer moduleBECKER ROBERT K·Filed 2011·Application pending·0 cites
- 1336US2011240602A1High-voltage gas cluster ion beam (gcib) processing systemTEL EPION INC·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →