Inventor · disambiguated record
Katrin Pietsch
Also filed as: PIETSCH KATRIN
2 granted patents·1 pending application·0 citations·filing 2008–2008
23Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH3
Top patents by PatentIndex Score
3 records- 0143US7948635B2Method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 24, 2011·0 cites·9 claims
- 0236US7872763B2Device for measuring the position of at least one structure on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jan 18, 2011·0 cites·6 claims
- 0335US2009126525A1Apparatus and method for supporting a substrate at a position with high precisionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →