Inventor · disambiguated record
Inna V. Babich
Also filed as: BABICH INNA V
7 granted patents·213 citations·filing 1991–2001
88Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0193US6685853B1Energy sensitive electrically conductive admixtures, uses thereof, methods of fabrication and structures fabricated therewithIBM·Filed 2000·Granted Feb 3, 2004·79 cites·9 claims
- 0283US6197896B1Graft polymers and use thereofIBM·Filed 1999·Granted Mar 6, 2001·45 cites·42 claims
- 0367US6251569B1Forming a pattern of a negative photoresistIBM·Filed 1999·Granted Jun 26, 2001·23 cites·25 claims
- 0465US6132644AEnergy sensitive electrically conductive admixturesIBM·Filed 1998·Granted Oct 17, 2000·28 cites·7 claims
- 0560US6617086B2Forming a pattern of a negative photoresistIBM·Filed 2001·Granted Sep 9, 2003·5 cites·21 claims
- 0653US6348299B1RIE etch resistant nonchemically amplified resist composition and use thereofIBM·Filed 1999·Granted Feb 19, 2002·14 cites·39 claims
- 0748US5185056AMethod and apparatus for etching semiconductor wafers and developing resistsIBM·Filed 1991·Granted Feb 9, 1993·19 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →