Inventor · disambiguated record
Hilario Oh
Also filed as: OH HILARIO · OH HILARIO L
16 granted patents·1 pending application·400 citations·filing 1982–2009
95Inventor score
Top patents by PatentIndex Score
17 records- 0194US6476921B1In-situ method and apparatus for end point detection in chemical mechanical polishingASML US INC·Filed 2000·Granted Nov 5, 2002·63 cites·17 claims
- 0293US6678572B1Recipe cascading in a wafer processing systemASML HOLDINGS N V·Filed 2000·Granted Jan 13, 2004·69 cites·8 claims
- 0387US6768930B2Method and apparatus for resolving conflicts in a substrate processing systemASML HOLDING NV·Filed 2003·Granted Jul 27, 2004·31 cites·8 claims
- 0487US6694218B2Method and apparatus for resolving conflicts in a substrate processing systemASML HOLDINGS N V·Filed 2002·Granted Feb 17, 2004·41 cites·24 claims
- 0585US6798529B2In-situ method and apparatus for end point detection in chemical mechanical polishingAVIZA TECH INC·Filed 2001·Granted Sep 28, 2004·35 cites·27 claims
- 0684US6458013B1Method of chemical mechanical polishingASML US INC·Filed 2000·Granted Oct 1, 2002·35 cites·17 claims
- 0773US6984168B1Apparatus and method for chemical mechanical polishing of substratesMASSACHUSETTS INST TECHNOLOGY·Filed 2000·Granted Jan 10, 2006·9 cites·9 claims
- 0872US7052919B2Recipe cascading in a wafer processing systemASML HOLDING NV·Filed 2003·Granted May 30, 2006·13 cites·29 claims
- 0970US6952622B2Robot pre-positioning in a wafer processing systemASML HOLDING NV·Filed 2003·Granted Oct 4, 2005·11 cites·8 claims
- 1068US8086473B2Method and system for managing operations and processes in healthcare delivery in a hospitalOH HILARIO L·Filed 2009·Granted Dec 27, 2011·4 cites·24 claims
- 1163US7029381B2Apparatus and method for chemical mechanical polishing of substratesAVIZA TECH INC·Filed 2001·Granted Apr 18, 2006·10 cites·16 claims
- 1262US4424706AEngine with knock sensing using product component of knock vibration signalGEN MOTORS CORP·Filed 1982·Granted Jan 10, 1984·17 cites·4 claims
- 1355US6865437B1Robot pre-positioning in a wafer processing systemASML HOLDINGS N V·Filed 2000·Granted Mar 8, 2005·4 cites·7 claims
- 1454US7139631B2Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication systemASML HOLDING NV·Filed 2004·Granted Nov 21, 2006·4 cites·20 claims
- 1549US6667239B2Chemical mechanical polishing of copper-oxide damascene structuresASML US INC·Filed 2002·Granted Dec 23, 2003·5 cites·21 claims
- 1648US6418356B1Method and apparatus for resolving conflicts in a substrate processing systemSILICON VALLEY GROUP·Filed 1999·Granted Jul 9, 2002·49 cites·23 claims
- 1739US2008051930A1Scheduling method for processing equipmentOH HILARIO L·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →