Inventor · disambiguated record
Emily E. Fisch
Also filed as: FISCH EMILY E
8 granted patents·2 pending applications·200 citations·filing 1998–2007
88Inventor score
Top patents by PatentIndex Score
10 records- 0187US6276370B1Sonic cleaning with an interference signalIBM·Filed 1999·Granted Aug 21, 2001·90 cites·48 claims
- 0278US6577406B2Structure for lithographic focus control featuresIBM·Filed 2002·Granted Jun 10, 2003·16 cites·20 claims
- 0371US6699400B1Etch process and apparatus thereforFiled 1999·Granted Mar 2, 2004·31 cites·14 claims
- 0470US6282459B1Structure and method for detection of physical interference during transport of an articleIBM·Filed 1998·Granted Aug 28, 2001·37 cites·32 claims
- 0565US7332054B2Etch apparatusIBM·Filed 2004·Granted Feb 19, 2008·8 cites·12 claims
- 0660US6777137B2EUVL mask structure and method of formationIBM·Filed 2002·Granted Aug 17, 2004·7 cites·20 claims
- 0752US2008066864A1Etch apparatusBALLANTINE ARNE W·Filed 2007·Application pending·0 cites
- 0848US6372573B2Self-aligned trench capacitor capping process for high density DRAM cellsTOSHIBA KK·Filed 1999·Granted Apr 16, 2002·10 cites·14 claims
- 0945US6683306B2Array foreshortening measurement using a critical dimension scanning electron microscopeIBM·Filed 2001·Granted Jan 27, 2004·1 cites·18 claims
- 1037US2003196679A1Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxideIBM·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →