Inventor · disambiguated record
Allan D. Weed
Also filed as: WEED ALLAN · WEED ALLAN D
11 granted patents·1 pending application·106 citations·filing 1998–2016
89Inventor score
Top patents by PatentIndex Score
12 records- 0192US7789443B2Workpiece gripping deviceAXCELIS TECH INC·Filed 2007·Granted Sep 7, 2010·28 cites·3 claims
- 0284US7010388B2Work-piece treatment system having load lock and bufferAXCELIS TECH INC·Filed 2003·Granted Mar 7, 2006·35 cites·15 claims
- 0380US9911636B1Multiple diameter in-vacuum wafer handlingAXCELIS TECH INC·Filed 2016·Granted Mar 6, 2018·3 cites·16 claims
- 0480US8941968B2Heated electrostatic chuck including mechanical clamp capability at high temperatureJUSTESEN PERRY J I·Filed 2011·Granted Jan 27, 2015·6 cites·24 claims
- 0566US10186446B2Adjustable circumference electrostatic clampAXCELIS TECH INC·Filed 2016·Granted Jan 22, 2019·1 cites·26 claims
- 0662US6914251B1Alignment structure and method for mating a wafer delivery device to a wafer treatment toolAXCELIS TECH INC·Filed 2003·Granted Jul 5, 2005·9 cites·16 claims
- 0760US7954627B2Bin transporter systemBTSYSTEMS LLC·Filed 2008·Granted Jun 7, 2011·6 cites·20 claims
- 0858US8797706B2Heated annulus chuckLEE WILLIAM DAVIS·Filed 2011·Granted Aug 5, 2014·1 cites·20 claims
- 0950US6727509B2Wafer pedestal tilt mechanismFiled 2001·Granted Apr 27, 2004·3 cites·13 claims
- 1047US6734439B2Wafer pedestal tilt mechanism and cooling systemFiled 2001·Granted May 11, 2004·2 cites·17 claims
- 1144US6065499ALateral stress relief mechanism for vacuum bellowsEATON CORP·Filed 1998·Granted May 23, 2000·12 cites·17 claims
- 1235US2003070316A1Wafer pedestal tilt mechanism and cooling systemFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →