Inventor · disambiguated record
Steven A. Vitale
Also filed as: VITALE STEVEN A · VITALE STEVEN ARTHUR
12 granted patents·3 pending applications·551 citations·filing 2005–2015
89Inventor score
Top patents by PatentIndex Score
15 records- 0197US7494882B2Manufacturing a semiconductive device using a controlled atomic layer removal processTEXAS INSTRUMENTS INC·Filed 2006·Granted Feb 24, 2009·515 cites·22 claims
- 0294US10418350B2Semiconductor structures for assembly in multi-layer semiconductor devices including at least one semiconductor structureMASSACHUSETTS INST TECHNOLOGY·Filed 2015·Granted Sep 17, 2019·12 cites·20 claims
- 0390US9780075B2Interconnect structures for assembly of multi-layer semiconductor devicesMASSACHUSETTS INST TECHNOLOGY·Filed 2015·Granted Oct 3, 2017·7 cites·20 claims
- 0481US10079224B2Interconnect structures for assembly of semiconductor structures including at least one integrated circuit structureMASSACHUSETTS INST TECHNOLOGY·Filed 2015·Granted Sep 18, 2018·3 cites·16 claims
- 0573US7244642B2Method to obtain fully silicided gate electrodesTEXAS INSTRUMENTS INC·Filed 2005·Granted Jul 17, 2007·6 cites·15 claims
- 0670US7687396B2Method of forming silicided gates using buried metal layersTEXAS INSTRUMENTS INC·Filed 2006·Granted Mar 30, 2010·4 cites·19 claims
- 0763US7727842B2Method of simultaneously siliciding a polysilicon gate and source/drain of a semiconductor device, and related deviceTEXAS INSTRUMENTS INC·Filed 2007·Granted Jun 1, 2010·2 cites·20 claims
- 0859US8574980B2Method of forming fully silicided NMOS and PMOS semiconductor devices having independent polysilicon gate thicknesses, and related deviceMEHRAD FREIDOON·Filed 2007·Granted Nov 5, 2013·2 cites·18 claims
- 0951US7892957B2Gate CD trimming beyond photolithographyTEXAS INSTRUMENTS INC·Filed 2008·Granted Feb 22, 2011·0 cites·14 claims
- 1050US2009321846A1Method of Forming Fully Silicided NMOS and PMOS Semiconductor Devices Having Independent Polysilicon Gate Thicknesses, and Related DeviceTEXAS INSTRUMENTS INC·Filed 2009·Application pending·0 cites
- 1147US7439106B2Gate CD trimming beyond photolithographyTEXAS INSTRUMENTS INC·Filed 2006·Granted Oct 21, 2008·0 cites·19 claims
- 1242US9035399B2Structure for facilitating the simultaneous silicidation of a polysilicon gate and source/drain of a semiconductor deviceMEHRAD FREIDOON·Filed 2010·Granted May 19, 2015·0 cites·6 claims
- 1342US7910289B2Use of dual mask processing of different composition such as inorganic/organic to enable a single poly etch using a two-print-two-etch approachTEXAS INSTRUMENTS INC·Filed 2006·Granted Mar 22, 2011·0 cites·19 claims
- 1442US2007099424A1Reduction of mechanical stress on pattern specific geometries during etch using double pattern layout and process approachTEXAS INSTRUMENTS INC·Filed 2005·Application pending·0 cites
- 1534US2013056641A1Solid-state neutron detector with gadolinium converterVITALE STEVEN A·Filed 2012·Application pending·0 cites
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