Inventor · disambiguated record
Kiwamu Ito
Also filed as: ITO KIWAMU
3 granted patents·3 pending applications·4 citations·filing 2020–2023
56Inventor score
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0192US12131889B2Plasma generating apparatus, plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Oct 29, 2024·2 cites·9 claims
- 0279US11694890B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jul 4, 2023·2 cites·11 claims
- 0363US12469694B2Film forming methodTOKYO ELECTRON LTD·Filed 2023·Granted Nov 11, 2025·0 cites·9 claims
- 0451US2023326742A1Deposition method and processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0550US2024087925A1Information processing apparatus and parameter control methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0648US2022238335A1Method for forming film and processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →