Inventor · disambiguated record
Gustaaf Verhaegen
Also filed as: VERHAEGEN GUSTAAF
3 granted patents·3 pending applications·7 citations·filing 2006–2010
61Inventor score
Top patents by PatentIndex Score
6 records- 0171US7704850B2Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 27, 2010·3 cites·18 claims
- 0262US8136078B2OptimizationNACKAERTS AXEL·Filed 2008·Granted Mar 13, 2012·3 cites·16 claims
- 0361US7786477B2Semiconductor device for measuring an overlay error, method for measuring an overlay error, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Aug 31, 2010·1 cites·4 claims
- 0446US2007172770A1Methods for manufacturing dense integrated circuitsWITTERS LIESBETH·Filed 2006·Application pending·0 cites
- 0544US2011084313A1Methods for Manufacturing Dense Integrated CircuitsIMEC·Filed 2010·Application pending·0 cites
- 0640US2009217224A1Method and system for mask design for double patterningIMEC INTER UNI MICRO ELECTR·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →