Inventor · disambiguated record
Philip D. Flanner, Iii
Also filed as: FLANNER III PHILIP D · FLANNER PHILIP D
10 granted patents·229 citations·filing 1975–2014
89Inventor score
Files withKLA TENCOR TECH CORP3SYSTRON DONNER CORP3KLA TENCOR CORP2ILORETA JONATHAN1TENCOR INSTRUMENTS1
Top patents by PatentIndex Score
10 records- 0192US5581350AMethod and system for calibrating an ellipsometerTENCOR INSTRUMENTS·Filed 1995·Granted Dec 3, 1996·162 cites·20 claims
- 0283US8711349B2High throughput thin film characterization and defect detectionKLA TENCOR CORP·Filed 2012·Granted Apr 29, 2014·8 cites·21 claims
- 0375US9127927B2Techniques for optimized scatterometryILORETA JONATHAN·Filed 2012·Granted Sep 8, 2015·5 cites·40 claims
- 0473US10079183B2Calculated electrical performance metrics for process monitoring and yield managementKLA TENCOR CORP·Filed 2014·Granted Sep 18, 2018·3 cites·19 claims
- 0573US4538203APassive mass-spring type of sensing device having electronic dampingSYSTRON DONNER CORP·Filed 1983·Granted Aug 27, 1985·22 cites·19 claims
- 0660US7345761B1Film measurementKLA TENCOR TECH CORP·Filed 2004·Granted Mar 18, 2008·3 cites·20 claims
- 0755US7362686B1Film measurement using reflectance computationKLA TENCOR TECH CORP·Filed 2004·Granted Apr 22, 2008·7 cites·20 claims
- 0850US7190453B1Film measurementKLA TENCOR TECH CORP·Filed 2004·Granted Mar 13, 2007·5 cites·20 claims
- 0943US4169384ALinear accelerometer mechanismSYSTRON DONNER CORP·Filed 1977·Granted Oct 2, 1979·9 cites·23 claims
- 1041US4088026ALinear accelerometer mechanismSYSTRON DONNER CORP·Filed 1975·Granted May 9, 1978·5 cites·23 claims
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