Inventor · disambiguated record
Wayne Babie
Also filed as: BABIE WAYNE · BABIE WAYNE T
3 granted patents·115 citations·filing 1991–2001
75Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0175US6841483B2Unique process chemistry for etching organic low-k materialsLAM RES CORP·Filed 2001·Granted Jan 11, 2005·19 cites·13 claims
- 0271US5431772ASelective silicon nitride plasma etching processIBM·Filed 1992·Granted Jul 11, 1995·58 cites·7 claims
- 0363US5188704ASelective silicon nitride plasma etchingIBM·Filed 1991·Granted Feb 23, 1993·38 cites·27 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →