Inventor · disambiguated record
David Cooperberg
Also filed as: COOPERBERG DAVID · COOPERBERG DAVID J
12 granted patents·2 pending applications·1,228 citations·filing 1999–2015
94Inventor score
Top patents by PatentIndex Score
14 records- 0198US8425682B2High strip rate downstream chamberLAM RES CORP·Filed 2012·Granted Apr 23, 2013·378 cites·16 claims
- 0298US7932181B2Edge gas injection for critical dimension uniformity improvementLAM RES CORP·Filed 2006·Granted Apr 26, 2011·185 cites·19 claims
- 0396US8298336B2High strip rate downstream chamberWANG ING-YANN·Filed 2005·Granted Oct 30, 2012·384 cites·28 claims
- 0495US10403475B2Tunable multi-zone gas injection systemLAM RES CORP·Filed 2015·Granted Sep 3, 2019·13 cites·16 claims
- 0593US6804572B1Enhanced process and profile simulator algorithmsLAM RES CORP·Filed 2000·Granted Oct 12, 2004·34 cites·7 claims
- 0692US9051647B2Tunable multi-zone gas injection systemCOOPERBERG DAVID J·Filed 2009·Granted Jun 9, 2015·36 cites·12 claims
- 0792US6344105B1Techniques for improving etch rate uniformityLAM RES CORP·Filed 1999·Granted Feb 5, 2002·141 cites·29 claims
- 0889US7139632B2Enhanced process and profile simulator algorithmsLAM RES CORP·Filed 2004·Granted Nov 21, 2006·21 cites·11 claims
- 0981US6577915B1Applications of a semi-empirical, physically based, profile simulatorLAM RES CORP·Filed 2000·Granted Jun 10, 2003·11 cites·18 claims
- 1080US6301510B1Method and apparatus to calibrate a semi-empirical process simulatorLAM RES CORP·Filed 2000·Granted Oct 9, 2001·10 cites·19 claims
- 1173USRE39534EMethod and apparatus to calibrate a semi-empirical process simulatorLAM RES CORP·Filed 2002·Granted Mar 27, 2007·6 cites·18 claims
- 1272US7571697B2Plasma processor coilLAM RES CORP·Filed 2002·Granted Aug 11, 2009·9 cites·49 claims
- 1341US2014261803A1High strip rate downstream chamberLAM RES CORP·Filed 2013·Application pending·0 cites
- 1439US2003070620A1Tunable multi-zone gas injection systemFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →