Inventor · disambiguated record
Bjorn O. Pedersen
Also filed as: PEDERSEN BJORN O
7 granted patents·2 pending applications·423 citations·filing 1984–2004
89Inventor score
Top patents by PatentIndex Score
9 records- 0196US6020592ADose monitor for plasma doping systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1998·Granted Feb 1, 2000·155 cites·40 claims
- 0291US7126808B2Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma dopingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Oct 24, 2006·69 cites·20 claims
- 0390US7138768B2Indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Nov 21, 2006·49 cites·29 claims
- 0485US4527620AApparatus for controlling thermal transfer in a cyclic vacuum processing systemVARIAN ASSOCIATES·Filed 1984·Granted Jul 9, 1985·75 cites·22 claims
- 0576US7132672B2Faraday dose and uniformity monitor for plasma based ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Nov 7, 2006·21 cites·37 claims
- 0675US6653642B2Methods and apparatus for operating high energy accelerator in low energy modeVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Nov 25, 2003·36 cites·31 claims
- 0774US6762423B2Methods and apparatus for ion beam neutralization in magnetsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Jul 13, 2004·18 cites·26 claims
- 0840US2002030167A1Dose monitor for plasma doping systemFiled 2001·Application pending·0 cites
- 0936US2003079688A1Methods and apparatus for plasma doping by anode pulsingFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →