Inventor · disambiguated record
Sathyendra Ghantasala
Also filed as: GHANTASALA SATHYENDRA · GHANTASALA SATHYENDRA K · GHANTASALA SATHYENDRA KUMAR
8 granted patents·1 pending application·10 citations·filing 2015–2024
78Inventor score
Files withAPPLIED MATERIALS INC9
Top patents by PatentIndex Score
9 records- 0182US10607815B2Methods and apparatuses for plasma chamber matching and fault identificationAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·3 cites·20 claims
- 0281US9934351B2Wafer point by point analysis and data presentationAPPLIED MATERIALS INC·Filed 2015·Granted Apr 3, 2018·4 cites·20 claims
- 0375US10896833B2Methods and apparatus for detecting an endpoint of a seasoning processAPPLIED MATERIALS INC·Filed 2019·Granted Jan 19, 2021·3 cites·20 claims
- 0474US12435963B2Apparatus and method for controlling edge ring variationAPPLIED MATERIALS INC·Filed 2023·Granted Oct 7, 2025·0 cites·8 claims
- 0566US11668553B2Apparatus and method for controlling edge ring variationAPPLIED MATERIALS INC·Filed 2021·Granted Jun 6, 2023·0 cites·16 claims
- 0660US10553397B2Processing chamber hardware fault detection using spectral radio frequency analysisAPPLIED MATERIALS INC·Filed 2019·Granted Feb 4, 2020·0 cites·20 claims
- 0755US2025378138A1System and method for chamber matching using phase-based scoringAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0852US10283320B2Processing chamber hardware fault detection using spectral radio frequency analysisAPPLIED MATERIALS INC·Filed 2016·Granted May 7, 2019·0 cites·20 claims
- 0938US11209478B2Pulse system verificationAPPLIED MATERIALS INC·Filed 2018·Granted Dec 28, 2021·0 cites·16 claims
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