Inventor · disambiguated record
Lukasz Jerzy Macht
Also filed as: MACHT LUKASZ JERZY
11 granted patents·1 pending application·43 citations·filing 2010–2019
87Inventor score
Top patents by PatentIndex Score
12 records- 0195US8842293B2Level sensor arrangement for lithographic apparatus and device manufacturing methodDEN BOEF ARIE JEFFREY·Filed 2010·Granted Sep 23, 2014·16 cites·15 claims
- 0294US10481506B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·7 cites·24 claims
- 0390US8570492B2Lithographic apparatusVAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS·Filed 2012·Granted Oct 29, 2013·6 cites·20 claims
- 0489US9696638B2Lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jul 4, 2017·3 cites·18 claims
- 0582US9488465B2Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatusASML NETHERLANDS BV·Filed 2012·Granted Nov 8, 2016·8 cites·49 claims
- 0674US11181828B2Method of determining a value of a parameter of interest of a patterning process, device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 23, 2021·2 cites·20 claims
- 0774US10466594B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 5, 2019·1 cites·17 claims
- 0866US2020050114A1Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 0964US11022892B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jun 1, 2021·0 cites·22 claims
- 1060US9229340B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Jan 5, 2016·0 cites·20 claims
- 1143US8488107B2Lithographic apparatus and device manufacturing method involving a level sensor having multiple projection units and detection unitsDEN BOEF ARIE JEFFREY·Filed 2011·Granted Jul 16, 2013·0 cites·16 claims
- 1239US8675210B2Level sensor, lithographic apparatus, and substrate surface positioning methodDEN BOEF ARIE JEFFREY·Filed 2012·Granted Mar 18, 2014·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →