Inventor · disambiguated record

Kaan-Lu Tzou

Also filed as: TZOU KAAN-LU

4 granted patents·34 citations·filing 2002–2006

74Inventor score

Technology areasH10P

Files withNANYA TECHNOLOGY CORP4

Top patents by PatentIndex Score

4 records

0179US7341952B2Multi-layer hard mask structure for etching deep trench in substrateNANYA TECHNOLOGY CORP·Filed 2006·Granted Mar 11, 2008·6 cites·14 claims
0278US6727159B2Method of forming a shallow trench isolation in a semiconductor substrateNANYA TECHNOLOGY CORP·Filed 2002·Granted Apr 27, 2004·23 cites·7 claims
0355US7029753B2Multi-layer hard mask structure for etching deep trench in substrateNANYA TECHNOLOGY CORP·Filed 2003·Granted Apr 18, 2006·4 cites·6 claims
0446US6900118B2Method for preventing contact defects in interlayer dielectric layerNANYA TECHNOLOGY CORP·Filed 2003·Granted May 31, 2005·1 cites·17 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →