Inventor · disambiguated record
Rock Nadeau
Also filed as: NADEAU ROCK
10 granted patents·396 citations·filing 1996–2001
92Inventor score
Top patents by PatentIndex Score
10 records- 0193US6334807B1Chemical mechanical polishing in-situ end point systemIBM·Filed 1999·Granted Jan 1, 2002·113 cites·27 claims
- 0286US6022266AIn-situ pad conditioning process for CMPIBM·Filed 1998·Granted Feb 8, 2000·76 cites·21 claims
- 0384US6319093B1Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurementIBM·Filed 2001·Granted Nov 20, 2001·32 cites·26 claims
- 0470US6579149B2Support and alignment device for enabling chemical mechanical polishing rinse and film measurementsIBM·Filed 2001·Granted Jun 17, 2003·13 cites·20 claims
- 0568US6458020B1Slurry recirculation in chemical mechanical polishingIBM·Filed 2001·Granted Oct 1, 2002·15 cites·6 claims
- 0668US5663637ARotary signal coupling for chemical mechanical polishing endpoint detection with a westech toolIBM·Filed 1996·Granted Sep 2, 1997·41 cites·22 claims
- 0762US5874318ADishing and erosion monitor structure for damascene metal processingINTERNATIOAL BUSINESS MACHINES·Filed 1996·Granted Feb 23, 1999·26 cites·3 claims
- 0861US5885135ACMP wafer carrier for preferential polishing of a waferIBM·Filed 1997·Granted Mar 23, 1999·32 cites·17 claims
- 0959US5723874ADishing and erosion monitor structure for damascene metal processingIBM·Filed 1996·Granted Mar 3, 1998·22 cites·17 claims
- 1058US6340601B1Method for reworking copper metallurgy in semiconductor devicesIBM·Filed 1999·Granted Jan 22, 2002·26 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →